INEX operates a 150 mm wafer format multi-material microfabrication facility in Newcastle upon Tyne in the UK, consisting of 400 m2 of class 100 cleanroom for front-end processing, and 150 m2 of class 10,000 cleanroom with local class 100 hoods for back-end processing, packaging, test and characterisation.
Much of our equipment can also accommodate 100 mm wafers and we routinely process small (e.g. mm-sized), irregular and thin film materials through use of appropriate carrier wafers and sample holders.
Our equipment set includes e-beam, stepper and contact lithography, plasma deposition and etch, wet etching, wafer bonding, thermal processing, metallisation (DC and RF sputtering, e-beam evaporation, DC and pulsed plating), metrology, testing, characterisation, and back-end processing.
More information about our process capability is provided in our corresponding brochure.